The study investigated the efficiency of a biofilter to treat volatile organic compounds used as solvent in industrial activities including Toluene, Xylene and Thinner which consists of 64% Toluene. The experiment was divided into 3 parts consisting of treatment of Toluene, Xylene and Thinner vapor at concentrations of 50, 100, 200, 300 and 400 ppm and Empty Bed Retention Time (EBRT) of 30, 60 and 90 seconds. The biofilter compositions were mixture of compost, manure, wood chips and microorganism sludge having composition by volume of 60:10:20:10 respectively. The flowrate was maintained at 6.28 liter per minute. The results showed that treatment of 50 ppm Toluene vapor with EBRT 90 seconds yielded efficiency of 99.9 ±0.1%. When the concentrations were increased to 100, 200, 300 and 400 ppm using EBRT of 90 seconds the removal efficiency of Toluene was 97.8±1.7%, 91.5±1.0%, 86.4±2.0% and 78.5±3.0%, respectively. Treatment of 50 ppm Xylene vapor at 90 seconds EBRT yielded efficiency of 97.5±1.9%. When Xylene vapor concentrations were increased to 100, 200, 300 and 400 ppm using EBRT of 90 seconds the removal efficiency were 99.5±0.5%, 96.6±1.1%, 93.4±1.1% and 85.9±1.6%, respectively. Treatment of 50 ppm Thinner vapor at 90 seconds EBRT yielded efficiency of 99.3±0.3%. When Thinner vapor concentrations were increased to 100, 200, 300 and 400 ppm using EBRT of 90 seconds the removal efficiency were 99.1±0.4%, 95.6±0.4%, 87.0±4.1% and 70.5±5.8%, respectively.