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WALAILAK JOURNAL OF SCIENCE AND TECHNOLOGY


Volume 16, No. 06, Month JUNE, Year 2019, Pages 385 - 390


Spatial temperature profile in a magnetised capacitively coupled discharge

Shikha BINWAL, Jay K JOSHI, Shantanu Kumar KARKARI, Predhiman Krishan KAW, Lekha NAIR, Huw LEGGATE, Aoife SOMERS, Miles M TURNER


Abstract Download PDF

A floating emissive probe has been used to obtain the spatial electron temperature (Te) profile in a 13.56 MHz parallel plate capacitive coupled plasma. The effect of an external transverse magnetic field and pressure on the electron temperature profile has been discussed. In the un-magnetised case, the bulk region of the plasma has a uniform Te. Upon application of the magnetic field, the Te profile becomes non-uniform and skewed. With increase in pressure, there is an overall reduction in electron temperature. The regions adjacent to the electrodes witnessed a higher temperature than the bulk for both cases. The emissive probe results have also been compared with particle-in-cell simulation results for the un-magnetised case.


Keywords

Emissive probe, electron temperature, transverse magnetic field, capacitive coupled discharge.



WALAILAK JOURNAL OF SCIENCE AND TECHNOLOGY


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